MEC3010 - Micro and nanotechnologies: Fabrication and applications - 2019

6 points, SCA Band 2, 0.125 EFTSL

Undergraduate - Unit

Refer to the specific census and withdrawal dates for the semester(s) in which this unit is offered.



Organisational Unit

Department of Mechanical and Aerospace Engineering

Chief examiner(s)

Professor Chris Davies


Dr Victor J. Cadarso and Professor Adrian Neild

Quota applies

This unit is has a space restriction of 50 students

Unit guides



  • First semester 2019 (On-campus)


This unit aims to develop an understanding of Micro and Nanotechnology methods and techniques in a cleanroom environment, the design of process chains and the applications of devices that are currently being manufactured using them.

Micro and nanofabrication form the basis of manufacturing any modern miniaturised system from computer chips to sensors and actuators in smartphones, tablets, cars and other vehicles, and diagnostic systems, biomedical devices and devices for environmental monitoring.

This unit will combine both the theoretical aspects of micro and nanotechnologies and the hands-on experience of working in a state-of-the-art cleanroom environment at the Melbourne Centre for Nanofabrication, where students will need to design and fabricate their own microdevice.


On successful completion of this unit, students will be able to:

  1. Describe different types of manufacturing and production systems for micro and nanotechnologies.
  2. Generate simple layouts for micro and nano-masks fabrication.
  3. Analyse different Micro and Nanotechnologies techniques.
  4. Design the process flow for the manufacturing of a micro and nanodevice in a cleanroom and construct it.
  5. Analyse the operation of micro and nanodevices.


Continuous assessment: 60%

Final examination (2 hours): 40%

Students are required to achieve at least 45% in the total continuous assessment component and at least 45% in the final examination component and an overall mark of 50% to achieve a pass grade in the unit. Students failing to achieve this requirement will be given a maximum of 45% in the unit.

Workload requirements

Minimum total expected workload to achieve the learning outcomes for this unit is 144 hours per semester typically comprising a mixture of 4-6 hours of scheduled learning activities and 6-8 hours independent study per week. Scheduled activities may include a combination of teacher directed learning, peer directed learning and online engagement. Independent study may include associated readings, assessment and preparation for scheduled activities. If independent study during mid-semester break, SWOTVAC and exam periods are included, the total workload can exceed the minimum expected workload.

See also Unit timetable information